Plasma Cleaning and Surface Activation
Surface preparation
Treating the sample surface with atmospheric plasma — no vacuum chambers, no complex preparation. The plasma removes organic contamination and oxide films and activates the surface before the next operations.
Working gases are air, argon, nitrogen or oxygen. Plasma voltage is 0.5–2.5 kV, power up to 1.5 kW, generator frequency 10–30 kHz. Process parameter stability is 5–10 %.5 unit within the PL-Plasma-EChemSurfPrep system.
Implemented on equipment
